2100C/2200C|DataSheet?0.1or0.2micronsensitivityat1cfm?Counts6sizessimultaneously?ISO14644-1calculations?FMS:Supportsmanifold,upto32ports?ZeroCount:Lessthan1countevery5minutes?加上減壓閥可測CDA、N2、ARApplicationSoftware-PortAll?21006ch:0.1,0.2,0.3,0.5,0.7,1.0?22006ch:0.2,0.3,0.5,1.0,3.0,5.0?Flowrate:1cfm?DataStorage:400samples,內(nèi)鍵打印機(jī)。?LightSource:He-Nelaser